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News

November 6, 2024

Press Release

NexGen Wafer Systems Introduces SERENO, a versatile, high-throughput Wet Etch and Clean Solution with Integrated Metrology for 6”, 8” and 12” Substrates

NOV 6, 2024 /// NexGen Wafer Systems today announced the launch of SERENO, a versatile, high-throughput multi-chamber platform designed for wet etch and clean processes. The new system offers integrated metrology and supports 6″, 8″, and 12″ wafers, meeting the semiconductor industry’s need for precision and efficiency.

May 1, 2024

NexGen was Co-Host of the European CMP & WET Users Group Meeting

The event provided a platform for high-level discussions, insights into the latest developments, and intensive professional exchange. Representatives from various companies and research institutions shared their knowledge and experiences on the topics of Chemical and Mechanical Polishing (CMP) and wet chemical processing of semiconductor wafers (WET).

Christian Kleindienst (NexGen Wafer Systems), Judith Schön (Gesundheits-und Thermenresort Warmbad-Villach), Barbara Lagger (Gesundheits-und Thermenresort Warmbad-Villach), Gerfried Zwicker (Zwickerconsult), Benjamin Steible (Fraunhofer ISIT), Knut Gottfried (ErzM-Technologies UG & Fraunhofer ENAS), Martin Kulawski (Advaplan Oy)

June 10, 2024

Doping-selective etching of silicon for wafer thinning in the fabrication of backside-illuminated stacked CMOS image sensors

Backside thinning, using silicon doping-selective etching, for the preparation of backside illuminated (BSI) CMOS sensors. Tailored HNA chemistry (HF: HNO3: CH3COOH) is used to stop at a dedicated p+/p- silicon transition layer with high p+/p- selectivity, providing sub‑micron total thickness variation.

Backside Thinning

October 18, 2022

Introduction to SECS/GEM

Meet Iwin Lee, Software Lead at NexGen Wafer Systems, as he shares insights into SECS/GEM and GEM300, the gold standard communication protocols in semiconductor manufacturing. Discover how these standards streamline fab operations and how NexGen ensures compliance for seamless equipment integration and enhanced automation solutions.

Press Information

About NexGen Wafer Systems /// General Company Presentation

General Press Information – For Valued Use by Media Representatives.